Open AccessAberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory
Author(s) -
Peter Dirksen,
Joseph J. M. Braat,
A. J. E. M. Janssen,
Ad Leeuwestein
Publication year - 2005
Publication title -
optical microlithography xviii
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1117/12.597406
Subject(s) - zernike polynomials , optics , point spread function , focus (optics) , lens (geology) , spherical aberration , physics , optical transfer function , computer science , wavefront
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