Fabrication of integrated lens pair test device | Zendy

Mark R. Mackenzie | Zendy; Chee Yee Kwok | Zendy; GangDing Peng | Zendy

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Fabrication of integrated lens pair test device

Author(s) -

Mark R. Mackenzie,

Chee Yee Kwok,

GangDing Peng

Publication year - 2005

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.582391

Subject(s) - fabrication , lens (geology) , computer science , test (biology) , materials science , optics , geology , physics , medicine , alternative medicine , pathology , paleontology

A silica microlens has been proposed which can be integrated with planar optical waveguide circuits. In order to fabricate the microlens, two deep silica etches must be performed. RIE is the prefered process as under certain conditions it is anisotropic. This paper reports on a study of different masking materials and plasma etch conditions trialed for the deep silica etch

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