Open AccessPulsed laser annealing of GaAs implanted with Se and Si
Author(s) -
A. Rys
Publication year - 1990
Publication title -
optical engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.357
H-Index - 105
eISSN - 1560-2303
pISSN - 0091-3286
DOI - 10.1117/12.55603
Subject(s) - materials science , excimer laser , raman spectroscopy , laser , annealing (glass) , optoelectronics , analytical chemistry (journal) , excimer , activation energy , dye laser , optics , chemistry , chromatography , physics , organic chemistry , composite material
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