Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions | Zendy

Leszek Sałbut | Zendy; Jacek Kacperski | Zendy; Adam Styk | Zendy; Michał Józwik | Zendy; Christophe Gorecki | Zendy; Hakan Ürey | Zendy; Alain Jacobelli | Zendy; Thierry Dean | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions

Author(s) -

Leszek Sałbut,

Jacek Kacperski,

Adam Styk,

Michał Józwik,

Christophe Gorecki,

Hakan Ürey,

Alain Jacobelli,

Thierry Dean

Publication year - 2004

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.545574

Subject(s) - interferometry , phase (matter) , stroboscope , amplitude , computer science , static analysis , transient (computer programming) , optics , physics , quantum mechanics , programming language , operating system

We present a methodology for static and dynamic testing of mechanical properties of microelements. The measurement path includes temporal phase shifting interferometry for quantitative static shape elements analysis. This is followed by determination of the resonance frequency by means of modified time average interferometry and transient amplitude and phase maps of vibrating micromembrane capturing and evaluation by phase shifting stroboscopic interferometry. Proper application of combination of these methods allows for quick and accurate analysis of micromembranes and optimization of their manufacturing conditions

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research