Open Access<title>Ion treatment in technology of diffraction optical elements</title>
Author(s) -
Natalia P. Shevchenko,
K. D. Megorskaja,
I. N. Reshetnikova
Publication year - 1991
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.50099
Subject(s) - diffraction , ion , computer science , physics , optoelectronics , telecommunications , optics , quantum mechanics
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