Optical scanners for high-resolution RSD systems | Zendy

Hakan Ürey | Zendy; Frank A. DeWitt | Zendy; Selso Luanava | Zendy

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<title>Optical scanners for high-resolution RSD systems</title>

Author(s) -

Hakan Ürey,

Frank A. DeWitt,

Selso Luanava

Publication year - 2002

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.478874

Subject(s) - flatness (cosmology) , scanner , microelectromechanical systems , computer science , finite element method , high resolution , resolution (logic) , deformation (meteorology) , optics , engineering , physics , artificial intelligence , structural engineering , remote sensing , optoelectronics , cosmology , quantum mechanics , meteorology , geology

This paper outlines the design trade-offs and measured results of scanner architectures for use in high resolution Retinal Scanning Displays: Mechanical resonant for horizontal scanning, and MEMS-based pinch correction and vertical linear scanners. Analysis steps and techniques used to model and minimize dynamic deformations are covered. This paper also discusses two types of scanners and associated mirror flatness issues. Dynamic flatness modeling and performance results are presented, followed by thermally induced deformations and possible athermalize solutions for MEMS-type scanning mirrors. Theory, FEA dynamic and thermal analysis, experimental results, and methods to reduce mirror deformation are discussed

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