Open AccessWavelength influence on the determination of subwavelength grating parameters by using optical scatterometry
Author(s) -
Lauryna Šiaudinytė,
Silvania F. Pereira
Publication year - 2020
Publication title -
data archiving and networked services (dans)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1117/12.2544156
Subject(s) - optics , grating , wavelength , diffraction , rigorous coupled wave analysis , blazed grating , diffraction grating , materials science , scattering , plane wave , near and far field , sensitivity (control systems) , light scattering , physics , engineering , electronic engineering
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