Open AccessInvestigation on lateral resolution of surface slope profilers
Author(s) -
Valeriy V. Yashchuk,
Ian Lacey,
Thomas Arnold,
H. Paetzelt,
Simon Rochester,
Frank Siewert,
Peter Z. Takacs
Publication year - 2019
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1117/12.2539527
Subject(s) - profilometer , optics , metrology , surface metrology , calibration , image resolution , interferometry , gaussian beam , materials science , beam (structure) , physics , surface finish , quantum mechanics , composite material
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