Open AccessOne-dimensional ion-beam figuring solution from Brookhaven National Laboratory
Author(s) -
Tianyi Wang,
Lei Huang,
Matthew Vescovi,
Dennis Kuhne,
Kashmira Tayabaly,
Nathalie Bouet,
Mourad Idir
Publication year - 2019
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.1117/12.2526074
Subject(s) - figuring , national laboratory , dwell time , optics , beam (structure) , linear particle accelerator , ion beam , nist , dimensional metrology , sample (material) , fabrication , computer science , metrology , physics , medicine , clinical psychology , engineering physics , alternative medicine , pathology , natural language processing , thermodynamics
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