Open AccessFabrication of optical nanodevices through field-emission scanning probe lithography and cryogenic etching
Author(s) -
Martin Hofmann,
Cemal Aydogan,
Ivo W. Rangelow,
Mahmut Bicer,
Arda D. Yalçınkaya,
Hamdi Torun,
B. Volland,
Onur Ates,
Claudia Lenk,
B. Erdem Alaca
Publication year - 2018
Publication title -
digital collections portal (koç university)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1117/12.2305268
Subject(s) - materials science , lithography , silicon on insulator , optoelectronics , resonator , photolithography , resist , electron beam lithography , etching (microfabrication) , nanolithography , near field scanning optical microscope , fabrication , silicon , nanotechnology , layer (electronics) , optical microscope , scanning electron microscope , medicine , alternative medicine , pathology , composite material
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