Open AccessChallenges for scanning electron microscopy and inspection on the nanometer scale for non-IC application: and how to tackle them using computational techniques
Author(s) -
Jens Bolten,
Caroline Porschatis,
T. Wahlbrink,
Max C. Lemme,
Nezih Ünal,
Kerim T. Arat
Publication year - 2017
Publication title -
data archiving and networked services (dans)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1117/12.2279564
Subject(s) - metrology , computer science , software , reliability (semiconductor) , artificial intelligence , key (lock) , image (mathematics) , feature (linguistics) , cover (algebra) , computer vision , engineering , mechanical engineering , optics , power (physics) , physics , computer security , quantum mechanics , programming language , linguistics , philosophy
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