Sub-diffraction surface topography measurement using a microsphere-assisted Linnik interferometer | Zendy

Paul Montgomery | Zendy; Sylvain Lecler | Zendy; Audrey LeongHoï | Zendy; Stéphane Perrin | Zendy; Pierre Pfeiffer | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Sub-diffraction surface topography measurement using a microsphere-assisted Linnik interferometer

Author(s) -

Paul Montgomery,

Sylvain Lecler,

Audrey LeongHoï,

Stéphane Perrin,

Pierre Pfeiffer

Publication year - 2017

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - Uncategorized

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.2270223

Subject(s) - stylus , interferometry , optics , interference microscopy , materials science , diffraction , interference (communication) , resolution (logic) , white light interferometry , microscopy , optical microscope , microscope , image resolution , near field scanning optical microscope , physics , computer science , acoustics , scanning electron microscope , computer network , channel (broadcasting) , artificial intelligence

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research