Open AccessDesign and implementation of precise x-ray metrology to control a 45-cm long x-ray deformable mirror
Author(s) -
Lisa Poyneer,
J. Ruz,
Jun Feng,
Weilun Chao,
J. Jackson,
J. Nasiatka,
Todd Decker
Publication year - 2016
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.2236568
Subject(s) - optics , metrology , physics , beamline , grating , interferometry , x ray optics , measure (data warehouse) , x ray , feature (linguistics) , beam (structure) , computer science , database , linguistics , philosophy
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