VCSELs for interferometric readout of MEMS sensors | Zendy

Darwin K. Serkland | Zendy; K.M. Geib | Zendy; Gregory M. Peake | Zendy; Gordon A. Keeler | Zendy; Michael Shaw | Zendy; Michael S. Baker | Zendy; Murat Okandan | Zendy

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VCSELs for interferometric readout of MEMS sensors

Author(s) -

Darwin K. Serkland,

K.M. Geib,

Gregory M. Peake,

Gordon A. Keeler,

Michael Shaw,

Michael S. Baker,

Murat Okandan

Publication year - 2016

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.2214522

Subject(s) - vertical cavity surface emitting laser , capacitive sensing , gyroscope , microelectromechanical systems , interferometry , laser , optics , accelerometer , optoelectronics , astronomical interferometer , position sensor , materials science , noise (video) , noise floor , wavelength , position (finance) , tunable laser , physics , acoustics , computer science , noise measurement , noise reduction , angular displacement , quantum mechanics , artificial intelligence , image (mathematics) , operating system , finance , economics

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