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Depth determination of critical fluence-limiting defects within planarized and non-planarized mirror coatings
Author(s) -
Christopher J. Stolz,
Justin Wolfe,
Paul B. Mirkarimi,
James A. Folta,
John J. Adams,
Marlon G. Menor,
Rajesh N. Raman,
Norm Neilsen,
Mary A. Norton,
Ronald L. Luthi,
Nick E. Teslich,
Carmen S. Mei,
Dinesh Patel
Publication year - 2015
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.2197349
Subject(s) - materials science , fluence , chemical mechanical planarization , coating , stack (abstract data type) , optical coating , optics , optoelectronics , laser , limiting , substrate (aquarium) , interference (communication) , polishing , composite material , computer science , physics , mechanical engineering , computer network , channel (broadcasting) , oceanography , geology , programming language , engineering

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