Open AccessComparative STEREO-LID (Spatio-TEmporally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films
Author(s) -
Yejia Xu,
Amir Khabbazi,
Travis Day,
Andrew Brown,
Luke A. Emmert,
Joseph J. Talghader,
Ella Suzanne Field,
Damon E. Kletecka,
John Curtis Bellum,
Dinesh Patel,
Carmen S. Mei,
Wolfgang Rudolph
Publication year - 2015
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.2196548
Subject(s) - dielectric , materials science , cathode ray , laser , laser beams , optics , electron , optoelectronics , physics , quantum mechanics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom