Open AccessEmploying partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light
Author(s) -
Jan Bußmann,
Michal Odstrčil,
R. Bresenitz,
D. Rudolf,
Jianwei Miao,
W.S. Brocklesby,
Detlev Grützmacher,
Larissa Juschkin
Publication year - 2015
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.2187852
Subject(s) - extreme ultraviolet lithography , extreme ultraviolet , coherent diffraction imaging , optics , physics , metrology , diffraction , lithography , coherence (philosophical gambling strategy) , radiation , optoelectronics , materials science , laser , phase retrieval , fourier transform , quantum mechanics
Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high-resolution extreme ultraviolet (EUV) microscopy. Here, we demonstrate CDI reconstruction of a complex valued object under illumination by a compact gas-discharge EUV light source emitting at 17.3 nm (O VI spectral line). The image reconstruction method accounts for the partial spatial coherence of the radiation and allows imaging even with residual background light. These results are a first step towards laboratory-scale CDI with a gas-discharge light source for applications including mask inspection for EUV lithography, metrology and astronomy
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