Open AccessAtomic layer deposition of Al2O3on NF3-pre-treated graphene
Author(s) -
Marcel Junige,
Tim Oddoy,
Rositsa Yakimova,
Vanya Darakchieva,
Christian Wenger,
Grzegorz Łupina,
Julia Kitzmann,
Matthias Albert,
Johann W. Bartha
Publication year - 2015
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.2181242
Subject(s) - atomic layer deposition , graphene , layer (electronics) , materials science , deposition (geology) , optoelectronics , nanotechnology , paleontology , sediment , biology
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