Yield-aware mask assignment using positive semi-definite relaxation in LELECUT triple patterning | Zendy

Yukihide Kohira | Zendy; Chikaaki Kodama | Zendy; Tomomi Matsui | Zendy; Atsushi Takahashi | Zendy; Shigeki Nojima | Zendy; Satoshi Tanaka | Zendy

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Yield-aware mask assignment using positive semi-definite relaxation in LELECUT triple patterning

Author(s) -

Yukihide Kohira,

Chikaaki Kodama,

Tomomi Matsui,

Atsushi Takahashi,

Shigeki Nojima,

Satoshi Tanaka

Publication year - 2015

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.2085285

Subject(s) - overlay , rounding , computer science , relaxation (psychology) , lithography , yield (engineering) , algorithm , boundary (topology) , function (biology) , topology (electrical circuits) , parallel computing , mathematics , materials science , optoelectronics , combinatorics , mathematical analysis , evolutionary biology , metallurgy , biology , psychology , social psychology , programming language , operating system

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