Open AccessModeling and simulations of new electrostatically driven, bimorph actuator for high beam steering micromirror deflection angles
Author(s) -
John Walton,
Ronald A. Coutu,
LaVern A. Starman
Publication year - 2015
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.2079390
Subject(s) - bimorph , deflection (physics) , cantilever , microelectromechanical systems , actuator , comb drive , voltage , beam (structure) , computer science , optics , materials science , physics , electrical engineering , optoelectronics , fabrication , engineering , medicine , alternative medicine , pathology , artificial intelligence , composite material
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