Open AccessSurface effects in simulations of scanning electron microscopy images
Author(s) -
Luc van Kessel,
K. HAGEN,
P. Kruit
Publication year - 2019
Publication title -
journal of micro/nanolithography mems and moems
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.394
H-Index - 42
eISSN - 1932-5134
pISSN - 1932-5150
DOI - 10.1117/1.jmm.18.4.044002
Subject(s) - plasmon , surface plasmon , scanning electron microscope , optics , scattering , perpendicular , electron , physics , signal (programming language) , secondary electrons , beam (structure) , monte carlo method , materials science , computational physics , condensed matter physics , geometry , quantum mechanics , mathematics , computer science , programming language , statistics
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