Open AccessNovel method for the fabrication of spatially variant structures
Author(s) -
Pradeep Srinivasan,
Zachary A. Roth,
Menelaos K. Poutous,
Eric G. Johnson
Publication year - 2009
Publication title -
journal of micro/nanolithography mems and moems
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.394
H-Index - 42
eISSN - 1932-5134
pISSN - 1932-5150
DOI - 10.1117/1.3066798
Subject(s) - grating , photoresist , materials science , optics , resist , fabrication , optoelectronics , nanotechnology , layer (electronics) , physics , medicine , alternative medicine , pathology
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