Open AccessDiffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser
Author(s) -
Vineeth Sasidharan,
Alexander Neumann,
S. R. J. Brueck
Publication year - 2021
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0001377
Subject(s) - materials science , optics , grating , laser , diffraction grating , laser diode , optoelectronics , lithography , interferometry , diffraction , beam splitter , photolithography , achromatic lens , diode , physics
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