Open AccessDiffusion of dopants and impurities in β-Ga2O3
Author(s) -
Rajnikant Sharma,
Mark E. Law,
F. Ren,
A. Y. Polyakov,
S. J. Pearton
Publication year - 2021
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0001307
Subject(s) - dopant , annealing (glass) , impurity , thermal diffusivity , materials science , analytical chemistry (journal) , redistribution (election) , conductivity , doping , chemistry , metallurgy , thermodynamics , optoelectronics , chromatography , physics , organic chemistry , politics , political science , law