Open AccessSystematic compositional analysis of sputter-deposited boron-containing thin films
Author(s) -
Babak Bakhit,
Daniel Primetzhofer,
Eduardo Pitthan,
Maurício A. Sortica,
Eleni Ntemou,
Johanna Rosén,
Lars Hultman,
I. Petrov,
Grzegorz Greczyński
Publication year - 2021
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0001234
Subject(s) - elastic recoil detection , x ray photoelectron spectroscopy , nuclear reaction analysis , materials science , boron , rutherford backscattering spectrometry , analytical chemistry (journal) , ion beam analysis , thin film , sputtering , stoichiometry , ion beam , chemistry , ion , nanotechnology , nuclear magnetic resonance , physics , organic chemistry , chromatography
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