Tunable and scalable fabrication of plasmonic dimer arrays with sub-10 nm nanogaps by area-selective atomic layer deposition | Zendy

Chengwu Zhang | Zendy; Tuo Gao | Zendy; Donal Sheets | Zendy; Jason Hancock | Zendy; Jason S. Tresback | Zendy; Brian G. Willis | Zendy

Open Access

Tunable and scalable fabrication of plasmonic dimer arrays with sub-10 nm nanogaps by area-selective atomic layer deposition

Author(s) -

Chengwu Zhang,

Tuo Gao,

Donal Sheets,

Jason Hancock,

Jason S. Tresback,

Brian G. Willis

Publication year - 2021

Publication title -

journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.429

H-Index - 119

eISSN - 2166-2754

pISSN - 2166-2746

DOI - 10.1116/6.0001205

Subject(s) - materials science , atomic layer deposition , plasmon , layer (electronics) , palladium , fabrication , nanostructure , deposition (geology) , conformal coating , nanotechnology , optoelectronics , coating , copper , thin film , catalysis , metallurgy , alternative medicine , pathology , sediment , medicine , paleontology , biochemistry , chemistry , biology

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