Open AccessDesign of line seeds for glancing angle deposition
Author(s) -
Chuang Qu,
Bruce Alphenaar,
Shamus McNamara,
Kevin Walsh
Publication year - 2021
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000998
Subject(s) - fabrication , photolithography , deposition (geology) , materials science , line (geometry) , micrometer , seeding , optoelectronics , nanotechnology , optics , physics , geometry , geology , paleontology , mathematics , sediment , medicine , alternative medicine , pathology , thermodynamics
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