Open AccessApplication of templated vapor-liquid-solid growth to heteroepitaxy of InP on Si
Author(s) -
Olivia D. Schneble,
Anica N. Neumann,
John S. Mangum,
A. G. Norman,
Emily L. Warren,
Jeramy D. Zimmerman
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000728
Subject(s) - materials science , wafer , fabrication , epitaxy , chemical vapor deposition , vapor phase , crystallite , nanotechnology , layer (electronics) , substrate (aquarium) , optoelectronics , metallurgy , medicine , oceanography , alternative medicine , physics , pathology , geology , thermodynamics