Open AccessOptical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas
Author(s) -
Keith Hernandez,
Alex Press,
Matthew Goeckner,
Lawrence Overzet
Publication year - 2021
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0000679
Subject(s) - materials science , overshoot (microwave communication) , plasma , atomic physics , electron , joule heating , voltage , ignition system , electron temperature , plasma diagnostics , physics , electrical engineering , quantum mechanics , composite material , thermodynamics , engineering
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