Open AccessOptical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas
Author(s) -
Keith Hernandez,
Alex Press,
Matthew Goeckner,
Lawrence Overzet
Publication year - 2021
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0000679
Subject(s) - overshoot (microwave communication) , plasma , joule heating , atomic physics , electron , materials science , voltage , electron temperature , ignition system , plasma diagnostics , physics , electrical engineering , quantum mechanics , composite material , thermodynamics , engineering