Open AccessAccuracy limitations for composition analysis by XPS using relative peak intensities: LiF as an example
Author(s) -
C. R. Brundle,
B. Vincent Crist,
Paul S. Bagus
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000674
Subject(s) - x ray photoelectron spectroscopy , substructure , photoionization , intensity (physics) , analytical chemistry (journal) , chemistry , atomic physics , computational physics , materials science , optics , ionization , physics , nuclear magnetic resonance , ion , structural engineering , organic chemistry , chromatography , engineering