Open AccessArea-selective aerosol jet fog deposition: Advancing large-area and sustainable fabrication
Author(s) -
Kamesh Mullapudi,
Nishit M. Murari,
Ryan H. Mansergh,
Douglas A. Keszler,
John F. Conley
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000642
Subject(s) - aerosol , deposition (geology) , trichlorosilane , materials science , chemical engineering , monolayer , surface modification , substrate (aquarium) , nanotechnology , chemistry , organic chemistry , silicon , metallurgy , geology , paleontology , oceanography , sediment , engineering