Open AccessSynthesis of large-area MoS2 films by plasma-enhanced chemical film conversion of solution-processed ammonium tetrathiomolybdate
Author(s) -
Souvik Bhattacharya,
Tianqi Liu,
Zhipeng Ye,
Rui He,
R. Mohan Sankaran
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000599
Subject(s) - molybdenum disulfide , crystallinity , materials science , raman spectroscopy , chemical engineering , chemical vapor deposition , transmission electron microscopy , annealing (glass) , thin film , dielectric barrier discharge , surface roughness , analytical chemistry (journal) , nanotechnology , dielectric , optoelectronics , chemistry , optics , composite material , organic chemistry , physics , engineering