Open Accesstert-butoxides as precursors for atomic layer deposition of alkali metal containing thin films
Author(s) -
Henrik Hovde Sønsteby,
Jon E. Bratvold,
Veronica Anne-Line Kathrine Killi,
Deepankar Choudhury,
Jeffrey W. Elam,
Helmer Fjellvåg,
Ola Nilsen
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000589
Subject(s) - atomic layer deposition , alkali metal , thin film , nanotechnology , materials science , chemical engineering , deposition (geology) , chemistry , inorganic chemistry , organic chemistry , paleontology , sediment , engineering , biology