Open Accesstert-butoxides as precursors for atomic layer deposition of alkali metal containing thin films
Author(s) -
Henrik H. Sønsteby,
Jon E. Bratvold,
Veronica A.-L. K. Killi,
Devika Choudhury,
Jeffrey W. Elam,
Helmer Fjellvåg,
Ola Nilsen
Publication year - 2020
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000589
Subject(s) - atomic layer deposition , alkali metal , thin film , nanotechnology , materials science , chemical engineering , deposition (geology) , chemistry , inorganic chemistry , organic chemistry , paleontology , sediment , engineering , biology
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