Open AccessModeling atomic layer deposition process parameters to achieve dense nanocrystal-based nanocomposites
Author(s) -
Austin J. Cendejas,
Dillon Moher,
Elijah Thimsen
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000588
Subject(s) - atomic layer deposition , nanocrystal , materials science , nanocomposite , infill , deposition (geology) , desorption , chemical engineering , nanotechnology , layer (electronics) , nanostructure , adsorption , composite material , chemistry , organic chemistry , paleontology , sediment , engineering , biology , ecology