Open AccessNanofabrication of silicon surfaces for reduced virus adhesion
Author(s) -
Ao Guo,
Y. Carol Shieh,
Ralu Divan,
Rong R. Wang
Publication year - 2021
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0000548
Subject(s) - nanolithography , materials science , nanotechnology , wetting , silicon , adhesion , etching (microfabrication) , nanostructure , dip pen nanolithography , wafer , transmission electron microscopy , nanoscopic scale , reactive ion etching , optoelectronics , composite material , fabrication , medicine , alternative medicine , pathology , layer (electronics)
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