Open AccessFabrication of free-standing silicon carbide on silicon microstructures via massive silicon sublimation
Author(s) -
Mojtaba Amjadipour,
Jennifer MacLeod,
Nunzio Motta,
Francesca Iacopi
Publication year - 2020
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0000490
Subject(s) - materials science , silicon , silicon carbide , sublimation (psychology) , nanocrystalline silicon , wafer , locos , optoelectronics , monocrystalline silicon , hybrid silicon laser , nanotechnology , strained silicon , fabrication , graphene , composite material , crystalline silicon , amorphous silicon , medicine , psychology , alternative medicine , pathology , psychotherapist
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