Open AccessUltrasonic atomization of titanium isopropoxide at room temperature for TiO2 atomic layer deposition
Author(s) -
Moon Hyung Jang,
Lei Yu
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000464
Subject(s) - materials science , atomic layer deposition , annealing (glass) , titanium , quartz crystal microbalance , evaporation , ellipsometry , layer (electronics) , wafer , chemical vapor deposition , analytical chemistry (journal) , thin film , chemical engineering , composite material , ultrasonic sensor , nanotechnology , metallurgy , chemistry , physics , organic chemistry , adsorption , chromatography , engineering , thermodynamics , acoustics