Open AccessAu-free low-temperature ohmic contacts for AlGaN/AlN/GaN heterostructures
Author(s) -
Xiaowei Wang,
Hsien-Chih Huang,
Bruce Green,
Xiang Gao,
Daniel Rosenmann,
Xiuling Li,
Jonathan Shi
Publication year - 2020
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0000287
Subject(s) - ohmic contact , materials science , transconductance , annealing (glass) , contact resistance , optoelectronics , heterojunction , high electron mobility transistor , transistor , current density , electrical engineering , metallurgy , composite material , voltage , physics , layer (electronics) , quantum mechanics , engineering