Open AccessHigh-capacity rotary drum for atomic layer deposition onto powders and small mechanical parts in a hot-walled viscous flow reactor
Author(s) -
Matthew Coile,
Matthias J. Young,
Joseph A. Libera,
Anil U. Mane,
Jeffrey W. Elam
Publication year - 2020
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000274
Subject(s) - materials science , atomic layer deposition , coating , gravimetric analysis , layer (electronics) , composite material , deposition (geology) , fluidized bed , evaporation , chemical engineering , chemistry , paleontology , organic chemistry , sediment , engineering , biology , physics , thermodynamics
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