Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition | Zendy

Brian C. Welch | Zendy; Olivia M. McIntee | Zendy; Anand B. Ode | Zendy; Bonnie Beth McKenzie | Zendy; Alan R. Greenberg | Zendy; Victor M. Bright | Zendy; Steven M. George | Zendy

Open Access

Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition

Author(s) -

Brian C. Welch,

Olivia M. McIntee,

Anand B. Ode,

Bonnie Beth McKenzie,

Alan R. Greenberg,

Victor M. Bright,

Steven M. George

Publication year - 2020

Publication title -

journal of vacuum science and technology a vacuum surfaces and films

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.583

H-Index - 112

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/6.0000271

Subject(s) - materials science , atomic layer deposition , chemical engineering , substrate (aquarium) , layer (electronics) , polyamide , porosity , permeance , polymer , deposition (geology) , dissolution , etching (microfabrication) , membrane , nanotechnology , polymer chemistry , permeation , chemistry , composite material , paleontology , sediment , geology , engineering , biochemistry , oceanography , biology

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