Open AccessContinuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition
Author(s) -
Brian C. Welch,
Olivia M. McIntee,
Anand B. Ode,
Bonnie Beth McKenzie,
Alan R. Greenberg,
Victor M. Bright,
Steven M. George
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000271
Subject(s) - materials science , atomic layer deposition , chemical engineering , substrate (aquarium) , layer (electronics) , polyamide , porosity , permeance , polymer , deposition (geology) , dissolution , etching (microfabrication) , membrane , nanotechnology , polymer chemistry , permeation , chemistry , composite material , paleontology , sediment , geology , engineering , biochemistry , oceanography , biology