Open AccessComprehensive characterization of copper oxide atomic layer deposition using water or ozone with enhanced bis-(dimethylamino-2-propoxide) copper delivery
Author(s) -
Jason R. Avila,
Charles R. Eddy,
Virginia D. Wheeler
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000248
Subject(s) - copper , atomic layer deposition , copper oxide , oxide , materials science , chemical vapor deposition , ozone , substrate (aquarium) , chemical engineering , layer (electronics) , deposition (geology) , nanotechnology , chemistry , metallurgy , organic chemistry , paleontology , oceanography , sediment , geology , engineering , biology