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Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO2 grown by atomic layer deposition
Author(s) -
Nuwanjula S. Samarasingha,
Stefan Zollner,
Dipayan Pal,
Rinki Singh,
Sudeshna Chattopadhyay
Publication year - 2020
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0000184
Subject(s) - materials science , blueshift , band gap , dielectric , exciton , thin film , ellipsometry , atomic layer deposition , absorption (acoustics) , lattice constant , potential well , ultraviolet , phonon , condensed matter physics , molecular physics , optoelectronics , photoluminescence , optics , nanotechnology , chemistry , diffraction , composite material , physics

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