Open AccessThickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO2 grown by atomic layer deposition
Author(s) -
Nuwanjula S. Samarasingha,
Stefan Zollner,
Dipayan Pal,
Rohit Singh,
Sudeshna Chattopadhyay
Publication year - 2020
Publication title -
journal of vacuum science and technology. b, nanotechnology and microelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0000184
Subject(s) - materials science , blueshift , band gap , thin film , exciton , dielectric , ellipsometry , absorption (acoustics) , atomic layer deposition , lattice constant , molecular physics , condensed matter physics , analytical chemistry (journal) , optoelectronics , photoluminescence , chemistry , optics , nanotechnology , diffraction , physics , chromatography , composite material