Open AccessGas-phase diagnostic studies of H2 and CH4 inductively coupled plasmas
Author(s) -
Tara L. Van Surksum,
Ellen R. Fisher
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000090
Subject(s) - plasma , inductively coupled plasma , excitation , chemistry , plasma parameters , excitation temperature , atomic physics , phase (matter) , hydrogen , gas phase , emission spectrum , physics , spectral line , organic chemistry , quantum mechanics , astronomy