Open AccessLow temperature platinum chemical vapor deposition on functionalized self-assembled monolayers
Author(s) -
Bryan G. Salazar,
Hanwen Liu,
Amy V. Walker,
Lisa McElweeWhite
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000087
Subject(s) - monolayer , chemical vapor deposition , chemistry , x ray photoelectron spectroscopy , radical , platinum , chlorine , deposition (geology) , alkyl , secondary ion mass spectrometry , analytical chemistry (journal) , photochemistry , inorganic chemistry , chemical engineering , ion , organic chemistry , catalysis , paleontology , biochemistry , sediment , engineering , biology