Open AccessEvaluation of alternatives to paraffin for antirelaxation coatings
Author(s) -
Jovian Lazare,
Nyesa A. Enakaya,
John L. Lyons
Publication year - 2020
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000061
Subject(s) - graphene , materials science , rubidium , adsorption , coating , chemical engineering , alkali metal , paraffin wax , silicon , molybdenum disulfide , nanotechnology , chemical physics , composite material , chemistry , wax , organic chemistry , potassium , engineering , metallurgy
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