Open AccessBallistic electron emission microscopy study of PtSi–n-Si(100) Schottky diodes
Author(s) -
Philipp Niedermann,
Lidia Quattropani,
Katalin Solt,
Andrew D. Kent,
O . Fischer
Publication year - 1992
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.586416
Subject(s) - schottky diode , transmission electron microscopy , silicide , materials science , schottky barrier , diode , electron , surface finish , mean free path , ballistic conduction , optoelectronics , optics , silicon , physics , nanotechnology , scattering , composite material , quantum mechanics
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