Open AccessSoft x-ray projection lithography using a 1:1 ring field optical system
Author(s) -
Alastair A. MacDowell,
J. E. Bjorkholm,
Jeffrey Bokor,
L. Eichner,
R. R. Freeman,
W Mansfield,
J. Pastalan,
L. H. Szeto,
D. M. Tennant,
O. R. Wood,
T. E. Jewell,
W. K. Waskiewicz,
D. L. White,
D. L. Windt,
W. T. Silfvast,
F. Zernike
Publication year - 1991
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.585315
Subject(s) - optics , undulator , lithography , storage ring , physics , ring (chemistry) , projection (relational algebra) , materials science , coherence (philosophical gambling strategy) , chemistry , laser , beam (structure) , computer science , organic chemistry , algorithm , quantum mechanics
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