Open AccessEffects of nitrogen pulsing on sputter-deposited beryllium films
Author(s) -
E.J. Hsieh,
C.W. Price,
E. L. Pierce,
R. G. Wirtenson
Publication year - 1990
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.577034
Subject(s) - beryllium , materials science , sputtering , ultimate tensile strength , composite material , analytical chemistry (journal) , irradiation , sputter deposition , substrate (aquarium) , metallurgy , thin film , chemistry , nanotechnology , physics , organic chemistry , oceanography , geology , chromatography , nuclear physics
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