Open AccessModels for the oxidation of silicon
Author(s) -
E. A. Lewis,
E. A. Irene
Publication year - 1986
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.574007
Subject(s) - silicon , process (computing) , physical modelling , computer science , oxidation process , statistical physics , materials science , engineering , physics , metallurgy , chemical engineering , geotechnical engineering , operating system
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