Open AccessVapor phase passivation of (100) germanium surfaces with HBr
Author(s) -
Alex Molina,
Jeffrey R. Shallenberger,
Suzanne E. Mohney
Publication year - 2020
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.5141941
Subject(s) - passivation , germanium , hydrobromic acid , x ray photoelectron spectroscopy , wafer , oxide , analytical chemistry (journal) , materials science , vapor phase , phase (matter) , chemistry , inorganic chemistry , chemical engineering , silicon , metallurgy , optoelectronics , layer (electronics) , nanotechnology , environmental chemistry , physics , organic chemistry , engineering , thermodynamics